The UHV-EGA Model 510Z is astate-of-the-art Ultra-High Vacuum Evolved Gas Analyzer. The UHV-EGAtechnique is also known as thermal desorption spectroscopy (TDS). This advancedinstrument uses mass spectrometry to identify evolved gases from solidor highly viscous samples. Samples under test are exposed to atemperature profile under high vacuum conditions. The results of thetesting can determine a materials thermal variant. Outgassing rates canalso be determined.
UHV-EGA510型是最先进的超高真空演化气体分析仪。UHV-EGA技术也被称为热吸附光谱（TDS）。这种先进的设备使用质谱仪从固体或高粘性样品中识别出气体。被测样品暴露在高真空条件下的温度剖面中。测试结果可以确定材料的热变化，放气速率也可以确定。
KeyFeatures 主要特点
- High Temperature Capability: The UHV-EGA can subject samples to temperatures up to 1200°C, making it suitable for analyzing a wide range of materials.
高温能力：UHV-EGA可以将样品置于高达1200°C的温度下，使其适用于分析各种材料。
- Ultra-High Vacuum: Operates under vacuum conditions of approximately <5E-8 Torr to minimize contamination and enhance analysis accuracy.
超高真空：在大约<5E-8 Torr的真空条件下操作，以尽量减少污染并提高分析准确性。
- Dynamic Ramp Rates: Supports temperature ramp rates from 0.1°C to 15°C per minute, allowing for customizable analysis.
动态斜率法：支持温度斜率从0.1°C到15°C每分钟范围，允许自定义分析。
- Wide Adjustable Mass Range: Equipped with a quadrupole mass spectrometer that covers a mass range of 1-300 amu.
可调质量范围广泛：配备四极质谱仪，覆盖1-300 amu的质量范围。
SystemSpecifications 设备规格
- Sample Size: Can analyze solid or semi-solid samples placed on a 2” diameter heater with a 2.375” headspace.
样品尺寸：可以分析固体或半固体样品，将其放置在直径2英寸带有2.375”顶部空间的加热器中。
- Analytical Capability: Measures total gas pressure, heater temperature, sample temperature, and ion count across the entire mass range.
分析能力：测量整个质量范围内的总气体压力、加热器温度、样品温度和离子数量。
- Comprehensive Software: For easy sample loading, setting up variety of heating and analytical protocols.
综合软件：便于样品加载，设置各种加热和分析方案。
- Accurate Data Acquisition: With real-time 2D and 3D visualization of acquired data during analysis
准确的数据采集：在分析过程中对采集的数据进行实时2D和3D可视化。
- Smart Interlock System: To protect the unit from power failures, operator errors and hardware failures
智能联锁系统：保护设备不受电源故障、操作错误和硬件故障的影响。
Applications设备应用
The UHV-EGA 510 isessential for various industries, particularly those involved in hermeticallysealed microelectronics packages and products for ultra-high vacuumapplications. Key applications include:
UHV-EGA510对涉及密封微电子封装和超高真空应用产品的行业尤为重要。主要应用包括：
- Contaminant Detection: Identifies and quantifies contaminants such as moisture, hydrogen, oxygen, hydrocarbons, and other volatiles that can affect device performance in sealed or UHV conditions.
污染物检测：识别和测量在密封或超高压条件下可能影响器件性能的污染物，如水汽、氢、氧、碳氢化合物和其他挥发物等。
- Failure Mechanism Analysis: Helps identify potential failure mechanisms like corrosion, electrical leakage, and dendritic growth by analyzing evolved gases.
失效机制分析：通过分析气体演化，帮助识别潜在的失效机制，如腐蚀、漏电和枝晶生长。 - Quality Control: Ensures materials and processes do not introduce harmful volatiles into sealed packages or in UHV conditions, thus maintaining high reliability standards.
质量控制：确保材料和工艺不会将有害挥发物引入密封包装超真空状态，从而保持高可靠性标准。
- Process Improvement: Facilitates the creation of efficient thermal processing methods and improves product quality by simulating the baking process at the component level.
工艺改进：通过模拟部件级的烘烤过程，促进高效热加工方法的创建，提高产品质量。